Temperature-compensating Fabry-Perot thin-film thickness
This technology is a fiber optic sensor that measures the thickness of very thin films—such as coatings or chemical layers—with built-in correction for temperature fluctuations. It works by using two optical cavities in a single sensor probe: one cavity measures the film thickness, while the other simultaneously measures temperature, allowing the system to subtract temperature-induced errors from the thickness reading in real time. The approach uses Fabry-Perot interferometry, a well-established optical technique that detects tiny changes in how light reflects between surfaces. The result is a highly accurate, self-calibrating thin-film measurement tool that does not require a separate temperature sensor.
What you could build
A compact fiber optic probe for in-situ monitoring of coating or film thickness in semiconductor fabrication, industrial coating lines, or chemical processing equipment, sold to process engineers and equipment OEMs who need precision without complex multi-sensor setups.
Who in Virginia should care
Defense and aerospace contractors in Northern Virginia and the Hampton Roads corridor working on precision coatings or optical sensing for harsh environments would be plausible licensees.
Readiness: Lab validated
Concept — described but not yet demonstrated. Lab validated — supported by experimental results in the patent. Prototype likely — the text describes a built, working embodiment.
Readiness is inferred from the patent text, not from a lab visit.
The record
- Inventors
- Yan Zhang, Kristie L. Cooper, Anbo Wang
- Granted
- February 24, 2009
- Status
- Granted patent
- Patent number
- 7495772
Ready to talk?
Virginia Tech Intellectual Properties handles licensing for this technology.
Prosim summaries are generated from public patent text and are not legal advice.